One of High temperature resistance ceramic metal super alloys was NiCoCrAlY that have resistance to high temperatures. Hence that it is development by using coatings called thermal barrier coating TBC. Thermal Barrier Coating System consisting of Yttria Stabilized Zirconia YSZ as a top coat and NiCoCrAlY as a bond coat. In the present study the bond coat and top coat are deposition on the metal using thermal spraying process. Hence the coating performed at high temperatures and high pressures. The residual stress of material will be measured as the result of the thermal spray. The residual stress of material will be measured by using X-Ray Diffraction and measurements analysis through modeling Rietveld using rietica program. Measurement is done at each depth 50mikrometer on top coat.