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ITS » Undergraduate Theses » Fisika
Posted by aguss at 20/02/2009 17:28:44  •  4931 Views


PENGARUH TEMPERATUR PADA KETEBALAN LAPISAN TIPIS POLYMETHYL METHACRYLATE PMMA HASIL FABRIKASI DENGAN TEKNIK SPIN COATING

PENGARUH TEMPERATUR PADA KETEBALAN LAPISAN TIPIS POLYMETHYL METHACRYLATE PMMA HASIL FABRIKASI DENGAN TEKNIK SPIN COATING

Author :
MUNIROH, KISWATUL 




ABSTRAK

Pada penelitian ini telah dilakukan fabrikasi lapisan tipis bahan PMMA Polymethyl Methacrylate yang dilarutkan pada toluena dengan metode spin coating. Dari hasil fabrikasi dilakukan pengukuran nilai ketebalan pada lapisan tipis yang diberi perlakuan panas perubahan temperatur. Proses fabrikasi dilakukan dengan variasi kecepatan putar 1000 rpm1500 rpm dan 2000 rpm selama 60 detik. Dari hasil penelitian diperoleh nilai ketebalan antara 12-4883 m. Nilai ketebalan ini dipengaruhi oleh kecepatan putar dan perubahan temperatur. Pada penelitian ini diberikan variasi temperatur kamar 300C 500C 1000C 1500C dan 1750C.


ABSTRACT

This research focuses on fabricating and measuring the thickness of film Polymethyl Methacrylate PMMA depended on temperature. The PMMA solution was spin coated on glass substrat at 1000rpm 1500 rpm and 2000 rpm for 60 secon for each speed respectively. The film thickness of PMMA were determined by microscope. It was found that film thickness were about 12 m till 4883 m. The result the thickness of thin film PMMA depend on temperature and speed of Spin Coating. The thickness is given variation temperature on 300C 500C 1000C 1500C dan 1750C.



KeywordsLapisan Tipis, PMMA (Polymethyl Methacrylate), Spin Coating
 
Subject:  Suhu ; Optimasi matematis
Contributor
  1. Drs. Gatut Yudoyono, M.T
    Drs. Gontjang Prajitno, M.S
Date Create: 20/02/2009
Type: Text
Format: pdf
Language: Indonesian
Identifier: ITS-Undergraduate-3100008032353
Collection ID: 3100008032353
Call Number: RSFi 667.9 Mun p


Source
Undergraduate Theses, Physics, RSFi 667.9 Mun p, 2007

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ITS-Undergraduate-3100008032353-3587.pdf




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